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Oxidized Silicon-On-Insulator (OxSOI) from bulk silicon: a new photonic platform

✍ Scribed by Sherwood-Droz, Nicolás; Gondarenko, Alexander; Lipson, Michal

Book ID: 115413016
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 217 KB
Volume: 18
Category: Article
ISSN: 1094-4087
DOI: 10.1364/OE.18.005785

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