✦ LIBER ✦
Bulk silicon microelectromechanical devices fabricated from commercial bonded and etched-back silicon-on-insulator substrates
✍ Scribed by A. Benitez; J. Esteve; J. Bausells
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 421 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0924-4247
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