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Oxide layers on GaAs prepared by thermal, anodic and plasma oxidation: In-depth profiles and annealing effects

✍ Scribed by Kuniaki Watanabe; Masao Hashiba; Yuko Hirohata; Masanori Nishino; Toshiro Yamashina

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 634 KB
Volume: 56
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90052-x

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