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Oxidation behaviour of nickel silicides investigated by AES and XPS

✍ Scribed by S. Valeri; U. Del Pennino; P. Sassaroli


Book ID
118984777
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
370 KB
Volume
134
Category
Article
ISSN
0039-6028

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## Abstract Clean Si(001) single crystal surfaces provided different surface reconstructions: __p__(1 × 2) and __c__(__n__ × 2) (__n__ = 4, 6) at room temperature. The __in situ__ oxidation of these surfaces was followed by Auger electron spectroscopy and by X‐ray photoelectron spectroscopy. It is