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Overlooked interfacial silicide-polysilicon gate resistance in MOS transistors

✍ Scribed by Litwin, A.

Book ID: 114538849
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 102 KB
Volume: 48
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.944214

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