✦ LIBER ✦

Origin of gas impurities in sputtering plasmas during thin film deposition

✍ Scribed by M. Andritschky

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Origin of gas impurities in sputtering p

📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 134 KB

Oxygen incorporation in Al thin films du

✍ DN Popov; TzK Kotlarova; TzD Uzunov; VN Gaydarova 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 362 KB

Reoxidation of silicon substrates during

✍ H. Behner 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 340 KB

In situ Grazing Incidence Scattering Inv

✍ Valentina Cantelli; Johannes von Borany; Nicole Martha Jeutter; Jörg Grenzer 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 645 KB

Deposition of ZrC thin films and plasma

✍ Masaaki Yoshitake; Toshikazu Nosaka; Akio Okamoto; Soichi Ogawa; Kazuhiro Nishik 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 609 KB

Transport processes in plasma assisted d

✍ S Athavale; O Auciello; M Bourham; O.E Hankins; A Gras-Marti; J.C Moreno-Marin; 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 252 KB