Origin of gas impurities in sputtering plasmas during thin film deposition : M. Andritschky. Vacuum42(12), 753 (1991)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 134 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90243-e