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Organometallic azides as precursors for aluminum nitride thin films

✍ Scribed by Boyd, David C.; Haasch, Richard T.; Mantell, Daniel R.; Schulze, Roland K.; Evans, John F.; Gladfelter, Wayne L.

Book ID: 126398057
Publisher: American Chemical Society
Year: 1989
Tongue: English
Weight: 767 KB
Volume: 1
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm00001a023

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