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Evolution of aluminum nitride nanostructures from nanoflower to thin film on silicon substrate by direct nitridation of aluminum precursor

✍ Scribed by Yu, Leshu; Hu, Zheng; Ma, Yanwen; Huo, Kaifu; Chen, Yi; Sang, Hai; Lin, Weiwei; Lu, Yinong

Book ID: 123157859
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 591 KB
Volume: 16
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2007.02.008

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