Preparation of Highly Oriented Aluminum Nitride Thin Films on Polycrystalline Substrates by Helicon Plasma Sputtering and Annealing

✍ Scribed by Morito Akiyama; Chao-Nan Xu; Masaya Kodama; Ichiro Usui; Kazuhiro Nonaka; Tadahiko Watanabe

• Book ID: 110828678
• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 174 KB
• Volume: 84
• Category: Article
• ISSN: 0002-7820
• DOI: 10.1111/j.1151-2916.2001.tb00937.x