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Optoelectronic properties of microcrystalline silicon films

✍ Scribed by F. Wünsch; G. Citarella; M. Kunst


Book ID
114085452
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
116 KB
Volume
403-404
Category
Article
ISSN
0040-6090

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Microcrystalline silicon thin films: A r
✍ A. Dussan; R.H. Buitrago; R.R. Koropecki 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 449 KB

In this work we present a study of the optical, electrical, electronic and structural properties of Boron doped hydrogenated microcrystalline silicon thin films (mc-Si:H). The films were deposited in an RF plasma reactor using as reactive gas a mixture of silane and diborane, both highly diluted in