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Optimizing the formation of nickel silicide

✍ Scribed by John Foggiato; Woo Sik Yoo; Michel Ouaknine; Tomomi Murakami; Takahashi Fukada

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 223 KB
Volume: 114-115
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.07.033

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