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Optimizing growth conditions for electroless deposition of Au films on Si(111) substrates

โœ Scribed by BhuvAna; G. U. Kulkarni


Book ID
105654287
Publisher
Springer-Verlag
Year
2006
Tongue
English
Weight
655 KB
Volume
29
Category
Article
ISSN
0250-4707

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Surface roughness and resistivity of Au
โœ Wu Tang; Kewei Xu; Ping Wang; Xian Li ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 188 KB

Au films were deposited on Si-(111) substrate by magnetron sputtering technique. The structure of the films was characterized by X-ray diffraction (XRD). The resistivity and the surface roughness were measured by four-point probe and atomic force microscopy (AFM). The results showed that Au-( ) was