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Optimized deposition of PLD-derived Ba0.8Sr0.2TiO3 thin film capacitor

✍ Scribed by Su Xing; Zhitang Song; Chenglu Lin

Book ID
117356731
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
196 KB
Volume
54
Category
Article
ISSN
0167-577X

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Interdigitated capacitors ha¨e been fabricated on ferroelectric thin films of Sr Ba TiO . These de¨ices ha¨e been characterized 0 .5 0 .5 3 at microwa¨e frequencies from 50 MHz to 20 GHz, and ha¨e a 3.4:1 tuning range o¨er a 1᎐40 V bias range. This is shown to originate from a relati¨e dielectric co