Effects of post-deposition oxygen annealing on tuning properties of Ba0.8Sr0.2TiO3 thin-film capacitors for microwave integrated circuits

✍ Scribed by Y.R. Liu; P.T. Lai; G.Q. Li; B. Li; J.B. Peng; H.B. Lo

• Book ID: 113781419
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 270 KB
• Volume: 94
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/j.matchemphys.2005.04.034