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Optimization of tribological properties of silicon dioxide during the chemical mechanical planarization process

✍ Scribed by A. K. Sikder; Frank Giglio; John Wood; Ashok Kumar; Mark Anthony

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mechanical and tribological properties o

✍ A. K. Sikder; Ashok Kumar 📂 Article 📅 2002 🏛 Springer US 🌐 English ⚖ 283 KB

Optimization of the chemical mechanical

✍ Zhong, Z. W.; Tian, Y. B.; Ang, Y. J.; Wu, H. 📂 Article 📅 2011 🏛 Springer 🌐 English ⚖ 470 KB

Removal of residual oxide layer formed d

✍ Sunwoo Lee; Boong-Joo Lee 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 797 KB

Tribological, thermal, and kinetic attri

✍ Jiao, Yubo ;Liao, Xiaoyan ;Wu, Changhong ;Zhuang, Yun ;Sampurno, Yasa ;Philiposs 📂 Article 📅 2012 🏛 IEEE ⚖ 635 KB

Tribological properties of silicon carbi

✍ Kazuhisa Miyoshi; Donald H. Buckley 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 968 KB

Molecular dynamics simulations of mechan

✍ Chagarov, Evgueni; Adams, James B. 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 923 KB