✦ LIBER ✦
Tribological, thermal, and kinetic attributes of 300 vs. 450 mm chemical mechanical planarization processes
✍ Scribed by Jiao, Yubo ;Liao, Xiaoyan ;Wu, Changhong ;Zhuang, Yun ;Sampurno, Yasa ;Philipossian, Ara ;Theng, Siannie ;Goldstein, Michael
- Book ID
- 111962447
- Publisher
- IEEE
- Year
- 2012
- Weight
- 635 KB
- Series
- undefined series for scimag
- Category
- Article
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