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Optimization of thickness and uniformity of photonic structures fabricated by interference lithography

✍ Scribed by Thi Thanh Ngan Nguyen, Quang Liem Nguyen, Joseph Zyss…


Book ID
120782678
Publisher
Springer
Year
2013
Tongue
English
Weight
819 KB
Volume
111
Category
Article
ISSN
1432-0630

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