Investigation of SOI photonic crystals fabricated by both electron-beam lithography and nanoimprint lithography

✍ Scribed by M. Belotti; M. Galli; D. Bajoni; L.C. Andreani; G. Guizzetti; D. Decanini; Y. Chen

• Book ID: 113797627
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 474 KB
• Volume: 73-74
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.02.078