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Optimization of the process for preparing Al-doped ZnO thin films by sol-gel method

✍ Scribed by JianLin Chen; Ding Chen; ZhenHua Chen


Book ID
107356259
Publisher
SP Science China Press
Year
2009
Tongue
English
Weight
1003 KB
Volume
52
Category
Article
ISSN
1006-9321

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The present study focused on ZnO thin films fabricated by sol-gel process and spin coated onto Si (1 0 0) and quartz substrates. ZnO thin films have a hexagonal wu Β¨rtzite structure with a grain diameter about 50 nm. Optical properties were determined by photoluminescence (PL) and absorption spectro