Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol–gel process
✍ Scribed by Weon-Pil Tai; Jae-Hee Oh
- Book ID
- 110345327
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 723 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0957-4522
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## Abstract Undoped and vanadium‐doped ZnO thin films were prepared on single‐crystalline p‐type Si(100) substrates by a sol–gel process and further annealed in an oxygen atmosphere. The influence of vanadium doping on the structural, surface morphological and optical properties of ZnO thin films w