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Optimization of sputtering conditions for protective carbon thin films of rigid disks deposited by FTS

✍ Scribed by K Noda; T Kawanabe; T Hirata; M Naoe

Book ID: 108390474
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 692 KB
Volume: 51
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(98)00296-6

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