Optimization of process conditions of selective epitaxial growth for elevated source/drain CMOS transistor

✍ Scribed by Takumi Nakahata; Kohei Sugihara; Shigemitsu Maruno; Yuji Abe; Tatsuo Ozeki

• Book ID: 108341667
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 291 KB
• Volume: 243
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(02)01481-1