✦ LIBER ✦
Effectiveness of Si thin buffer layer for selective SiGe epitaxial growth in recessed source and drain for pMOS
✍ Scribed by P.L. Cheng; C.I. Liao; C.C. Chien; C.L. Yang; S.F. Ting; L.S. Jeng; C.T. Huang; Osbert Cheng; S.F. Tzou; W.S. Hsu
- Book ID
- 113782364
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 763 KB
- Volume
- 107
- Category
- Article
- ISSN
- 0254-0584
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