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Optimization of oxygen-implanted silicon substrates for CMOS devices by electrical characterization

✍ Scribed by Foster, D.J.; Butler, A.L.; Bolbot, P.H.; Alderman, J.C.

Book ID: 114595517
Publisher: IEEE
Year: 1986
Tongue: English
Weight: 834 KB
Volume: 33
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1986.22494

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