✦ LIBER ✦
Electrical characterization of Si/SiO2 interfaces under silicon self-implantation: A Roy Chaudhuri, H Vishnoi and S Kar,Department of Electrical Engineering & Advanced Center for Materials Science, Indian Institute of Technology, Kampur-208016, Indiaand K Srikanth and S Ashok,Center for Electronic Materials and Devices and Department of Engineering Science, The Pennsylvania State University, University Park, PA 16802, USA
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 267 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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