Optimization of Ion Implantation Condition for Depletion-Type Silicon Optical Modulators

✍ Scribed by Hui Yu; Bogaerts, W.; De Keersgieter, A.

• Book ID: 114565849
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 414 KB
• Volume: 46
• Category: Article
• ISSN: 0018-9197
• DOI: 10.1109/jqe.2010.2067206