Spectroscopic ellipsometry measurements
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Tompkins, Harland G.; Tasic, Sonja; Baker, Jeff; Convey, Diana
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Article
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2000
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John Wiley and Sons
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English
β 151 KB
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Optical methods are used to determine the thickness of thin metal films, with emphasis on spectroscopic ellipsometry and transmission. We discuss the conditions where this is possible and how to determine the optical constants for the material. The determination of the thickness of each of two metal