✦ LIBER ✦

Optical Spectroscopy Applied to the Study of Plasma Etching

✍ Scribed by Frieser, R. G.; Nogay, J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Spatially resolved optical spectroscopy

✍ D. Field; A.J. Hydes; D.F. Klemperer 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 299 KB

A Study of the Optical Emission from an

✍ Harshbarger, W. R.; Porter, R. A.; Miller, T. A.; Norton, P. 📂 Article 📅 1977 🏛 Society for Applied Spectroscopy 🌐 English ⚖ 741 KB

Optical emission spectroscopy of plasma

✍ VJ Law; GAC Jones; DA Ritchie; M Tewordt 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 253 KB

Trench etching using a CBrF3 plasma and

✍ G Wöhl; A Weisheit; I Flohr; M Böttcher 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 505 KB

Abel inversion applied to plasma spectro

✍ Glasser, J. ;Chapelle, J. ;Boettner, J. C. 📂 Article 📅 1978 🏛 The Optical Society 🌐 English ⚖ 554 KB

The use of IR spectroscopy in studying t

✍ M. N. Bosyakov; A. A. Labuda; N. N. Nikiforenko 📂 Article 📅 1981 🏛 Springer US 🌐 English ⚖ 353 KB