✦ LIBER ✦

A Study of the Optical Emission from an rf Plasma during Semiconductor Etching

✍ Scribed by Harshbarger, W. R.; Porter, R. A.; Miller, T. A.; Norton, P.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical emission characteristics of abla

✍ K. Abe; O. Eryu; S. Nakashima; M. Terai; M. Kubo; M. Niraula; K. Yasuda 📂 Article 📅 2005 🏛 Springer US 🌐 English ⚖ 185 KB

Spatially resolved optical emission stud

✍ G. S. Selwyn; E. Kay 📂 Article 📅 1985 🏛 Springer 🌐 English ⚖ 893 KB

Study of the dynamics of optical emissio

✍ A. K. Shuaibov; M. P. Chuchman; A. I. Dashchenko 📂 Article 📅 2003 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 41 KB

Study of an argon–hydrogen RF inductive

✍ F Bourg; S Pellerin; D Morvan; J Amouroux; J Chapelle 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 258 KB

Studies of the optical emission from a h

✍ Baránková, H.; Bárdoš, L.; Berg, S. 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 569 KB

Drastic emission-spectra changes in a se

✍ Matsuura, Masaaki; Tanifuji, Tadatoshi; Yamamoto, Yoshikazu 📂 Article 📅 1986 🏛 Optical Society of America 🌐 English ⚖ 300 KB