Spatially resolved optical emission studies of fluorocarbon RF plasma through the use of UV-transmitting optical fibers

✍ Scribed by G. S. Selwyn; E. Kay

• Book ID: 104812525
• Publisher: Springer
• Year: 1985
• Tongue: English
• Weight: 893 KB
• Volume: 5
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1007/bf00566214