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Optical properties of WSi2 and MoSi2 single crystals as measured by spectroscopic ellipsometry and reflectometry

✍ Scribed by F Ferrieu; C Viguier; A Cros; A Humbert; O Thomas; R Madar; J.P Senateur


Publisher
Elsevier Science
Year
1987
Tongue
English
Volume
62
Category
Article
ISSN
0038-1098

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In this paper results concerning optical analysis of the SiO 2 =Si system performed by the combined ellipsometric and reflectometric method used in multiple-sample modification will be presented. This method is based on combining both the single-wavelength method and the dispersion method. Three mod