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Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing

โœ Scribed by Li, Yonglei; Qian, Bo; Li, Cong; Xu, Jun; Jiang, Chunping


Book ID
118415780
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
931 KB
Volume
265
Category
Article
ISSN
0169-4332

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HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and