Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing

✍ Scribed by Zeng, Yuheng; Chen, Xiaobo; Cheng, Qiang; Zhao, Junhua; Song, Weijie; Dai, Ning

• Book ID: 118415776
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 768 KB
• Volume: 265
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.10.197