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Optical properties of GeOx films obtained by laser deposition and dc sputtering in a reactive atmosphere

✍ Scribed by Vega, F. ;de Sande, J. C. G. ;Afonso, C. N. ;Ortega, C. ;Siejka, J.

Book ID
115343265
Publisher
The Optical Society
Year
1994
Tongue
English
Weight
750 KB
Volume
33
Category
Article
ISSN
1559-128X

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The NiO x thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in Ar + O 2 with the relative O 2 content 5%. The as-deposited NiO x thin films could represent a two-component system comprising crystalline NiO particles dispersed in an amorphous Ni 2 O 3 . Decompos