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Optical properties of amorphous carbon nitride synthesized on Si by ECR-CVD

✍ Scribed by X.W Liu; C.H Tseng; J.H Lin; L.T Chao; H.C Shih

Book ID: 108422833
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 168 KB
Volume: 135
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(00)01074-4

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