Optical nanolithography using a scanning near-field probe with an integrated light source

✍ Scribed by Kingsley, James W.; Ray, Sumon K.; Adawi, Ali M.; Leggett, Graham J.; Lidzey, David G.

• Book ID: 120243840
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 604 KB
• Volume: 93
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3032912