๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Optical MEMS pressure sensor based on a mesa-diaphragm structure

โœ Scribed by Ge, Yixian; Wang, Ming; Yan, Haitao

Book ID
115410393
Publisher
Optical Society of America
Year
2008
Tongue
English
Weight
636 KB
Volume
16
Category
Article
ISSN
1094-4087

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Diaphragm design guidelines and an optic
Diaphragm design guidelines and an optical pressure sensor based on MEMS technique
โœ Xiaodong Wang; Baoqing Li; Onofrio L. Russo; Harry T. Roman; Ken K. Chin; Kennet ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 585 KB

The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency. According to the study, the thickness need to be thin and the side length need to be small in or

A diaphragm based low-cost fiber optic p
A diaphragm based low-cost fiber optic pressure sensor
โœ P. Vengal Rao; K. Srimannarayana; M. Sai Shankar; P. Kishore; D. Sengupta; P. Sa ๐Ÿ“‚ Article ๐Ÿ“… 2012 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 1010 KB
An optical MEMS pressure sensor based on
An optical MEMS pressure sensor based on a phase demodulation method
โœ Yixian Ge; Ming Wang; Xuxing Chen; Hua Rong ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 719 KB

A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon