✦ LIBER ✦

An optical MEMS pressure sensor based on a phase demodulation method

✍ Scribed by Yixian Ge; Ming Wang; Xuxing Chen; Hua Rong

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 719 KB
Volume: 143
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2007.10.086

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✦ Synopsis

A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon membrane size and sensor performance has been simulated. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range from 0 to 3 MPa.

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