๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

A novel MEMS pressure sensor fabricated on an optical fiber

โœ Scribed by Abeysinghe, D.C.; Dasgupta, S.; Boyd, J.T.; Jackson, H.E.


Book ID
119788677
Publisher
IEEE
Year
2001
Tongue
English
Weight
41 KB
Volume
13
Category
Article
ISSN
1041-1135

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


An optical MEMS pressure sensor based on
โœ Yixian Ge; Ming Wang; Xuxing Chen; Hua Rong ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 719 KB

A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon

Diaphragm design guidelines and an optic
โœ Xiaodong Wang; Baoqing Li; Onofrio L. Russo; Harry T. Roman; Ken K. Chin; Kennet ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 585 KB

The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency. According to the study, the thickness need to be thin and the side length need to be small in or