A novel MEMS pressure sensor fabricated on an optical fiber
โ Scribed by Abeysinghe, D.C.; Dasgupta, S.; Boyd, J.T.; Jackson, H.E.
- Book ID
- 119788677
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 41 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1041-1135
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๐ SIMILAR VOLUMES
A novel optical fiber pressure sensor based on a Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and common communication devices are used to fabricate the sensor. The principle of pressure measurement has been introduced; the relationship between silicon
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency. According to the study, the thickness need to be thin and the side length need to be small in or