Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

✍ Scribed by Ju-Yi Lee; Hui-Yi Chen; Cheng-Chih Hsu; Chyan-Chyi Wu

• Book ID: 108262855
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 312 KB
• Volume: 137
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2007.02.017