Reflection type heterodyne grating interferometry for in-plane displacement measurement

✍ Scribed by Cheng-Chih Hsu; Chyan-Chyi Wu; Ju-Yi Lee; Hui-Yi Chen; Han-Fu Weng

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 860 KB
• Volume: 281
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/j.optcom.2007.12.098