Optical emission spectroscopy of self-sustained magnetron sputtering
โ Scribed by W.M. Posadowski; A. Brudnik
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 132 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
For a balanced dc magnetron discharge a linear model for the formation of excited and ionized species is presented. The consideration is based on collisional kinetic theory and a correlation of discharge current with ionization rates, and leads to normalized rate coefficients. The electron energy di
For applications at temperatures above 500ยฐC, Ti-6wt.%AI-4wt.%V was protected by sputtering chromium and chromium nitride layers from the embrittlement caused by oxidation. The coating processes were analysed in situ by means of optical emission spectrometry, whereby the deposition rate and the stab
The field emission properties of Ti-DLC films in diode and coplanar device structures were studied. An emission current density of 1.14 A/cm 2 could be obtained at an applied field of 33 V/mm and the threshold field was 24 V/mm for the coplanar emission structure. The silicon substrate was found to