๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Optical emission spectroscopy of self-sustained magnetron sputtering

โœ Scribed by W.M. Posadowski; A. Brudnik


Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
132 KB
Volume
53
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


A Linear Model for the Interpretation of
โœ J. Schulte; G. Sobe; G. Reiss ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 902 KB

For a balanced dc magnetron discharge a linear model for the formation of excited and ionized species is presented. The consideration is based on collisional kinetic theory and a correlation of discharge current with ionization rates, and leads to normalized rate coefficients. The electron energy di

D.c. magnetron sputtering of oxidation-r
โœ H. Benien; J. Maushart; M. Meyer; R. Suchentrunk ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 579 KB

For applications at temperatures above 500ยฐC, Ti-6wt.%AI-4wt.%V was protected by sputtering chromium and chromium nitride layers from the embrittlement caused by oxidation. The coating processes were analysed in situ by means of optical emission spectrometry, whereby the deposition rate and the stab

Emission properties of Ti-DLC films prep
โœ H.F. Liang; Z.H. Liang; C.L. Liu; L.G. Meng ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 565 KB

The field emission properties of Ti-DLC films in diode and coplanar device structures were studied. An emission current density of 1.14 A/cm 2 could be obtained at an applied field of 33 V/mm and the threshold field was 24 V/mm for the coplanar emission structure. The silicon substrate was found to