𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry

✍ Scribed by Jordi Sancho-Parramon; Salvador Bosch; Adolf Canillas

Book ID
108060018
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
348 KB
Volume
253
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Optical characterization of CuIn3Se5, Cu
Optical characterization of CuIn3Se5, CuGa3Se5and CuGa5Se8crystals by spectroscopic ellipsometry
✍ LeΓ³n, M. ;Serna, R. ;Levcenko, S. ;Nateprov, A. ;Nicorici, A. ;Merino, J. M. ;Ar πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 248 KB

## Abstract The ellipsometric spectra of CuIn~3~Se~5~, CuGa~3~Se~5~ and CuGa~5~Se~8~ ordered vacancy compounds (OVC) have been studied in the spectral range from 0.8 to 4.4 eV. The structures observed in the measured spectra were analyzed by fitting the second derivative of the experimental spectru

Optical Characterization of Silicon Oxyn
Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry
✍ Yi-Ming Xiong; Paul G. Snyder; John A. Woollam; G. A. Al-Jumaily; F. J. Gagliard πŸ“‚ Article πŸ“… 1992 πŸ› John Wiley and Sons 🌐 English βš– 424 KB

## Abstract Silicon oxynitride (SiO~x~ N~y~) thin films were deposited on silicon substrates by ion‐assisted deposition. Variable angle spectroscopic ellipsometry (VASE) was used to optically characterize the deposited film properties, such as layer thickness and composition, film surface and inter