Optical band gaps and composition dependence of hafnium–aluminate thin films grown by atomic layer chemical vapor deposition

✍ Scribed by Nguyen, N. V.; Sayan, S.; Levin, I.; Ehrstein, J. R.; Baumvol, I. J. R.; Driemeier, C.; Krug, C.; Wielunski, L.; Hung, P. Y.; Diebold, Alain

• Book ID: 127014903
• Publisher: AVS (American Vacuum Society)
• Year: 2005
• Tongue: English
• Weight: 513 KB
• Volume: 23
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.2091096