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Optical and strucutral properties of hydrogen implanted silicon carbon alloys

✍ Scribed by G. Compagnini; L. Calcagno; G. Foti


Book ID
113284943
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
509 KB
Volume
96
Category
Article
ISSN
0168-583X

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We have used picosecond transient photoreflectance techniques to measure the near-surface characteristics of unimplanted silicon and of silicon heavily implanted with carbon. These laser-based diagnostic techniques are non-destructive and allow measurement of the modification of near-surface propert