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Correlation of structure and optical properties of an annealed hydrogenated amorphous silicon-carbon alloy film

✍ Scribed by D.K. Basa


Book ID
107864457
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
535 KB
Volume
250
Category
Article
ISSN
0040-6090

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The influence of carbon content on the crystallization process has been investigated for the excimer laser annealed hydrogenated amorphous silicon carbon alloy films deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, using silane methane gas mixture diluted in helium, as well