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Optical and electronic properties of cobalt-doped zinc oxide films prepared by the sputtering method

✍ Scribed by K. Kobayashi; T. Maeda; S. Matsushima; G. Okada

Publisher
Springer
Year
1992
Tongue
English
Weight
452 KB
Volume
27
Category
Article
ISSN
0022-2461

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Optical and electrical properties of nan
Optical and electrical properties of nanocrystal zinc oxide films prepared by dc magnetron sputtering at different sputtering pressures
✍ Atanas TanuΕ‘evski; Verka Georgieva πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 673 KB

The nanocrystal thin films of zinc oxide doped by Al (ZnO:Al) were deposited by dc reactive magnetron sputtering on the glass substrates, in the pressure range of 33-51 Pa. From the X-ray diffraction patterns, the nanocrystalline structure of ZnO:Al films and the grain size were determined. The opti