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Optical and Dielectric Characterization of Atomic Layer Deposited Nb2O5 Thin Films

✍ Scribed by Blanquart, T.; Kukli, K.; Niinisto, J.; Longo, V.; Heikkila, M.; Ritala, M.; Leskela, M.

Book ID: 118128171
Publisher: The Electrochemical Society
Year: 2012
Tongue: English
Weight: 260 KB
Volume: 1
Category: Article
ISSN: 2162-8742
DOI: 10.1149/2.002201ssl

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