Fabrication of 3D proximity coupled Jose
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S.T. Herbert; L.B. GΓ³mez; D.B. Mast; R.S. Newrock; C. Wilks; C.M. Falco
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Article
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1995
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Elsevier Science
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English
β 351 KB
Experimentally realizable 3D arrays of Josephson junctions have been a goal of researchers since 2D Josephson junctions ( \(\mathbf{J}\) ) arrays were first introduced. In the past, it has proven to be technically impossible to manufacture 3D proximity-coupled arrays. Recent advancements in etching